JPH01163337U - - Google Patents

Info

Publication number
JPH01163337U
JPH01163337U JP6049388U JP6049388U JPH01163337U JP H01163337 U JPH01163337 U JP H01163337U JP 6049388 U JP6049388 U JP 6049388U JP 6049388 U JP6049388 U JP 6049388U JP H01163337 U JPH01163337 U JP H01163337U
Authority
JP
Japan
Prior art keywords
arm
transport mechanism
vertical movement
support pedestal
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6049388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6049388U priority Critical patent/JPH01163337U/ja
Publication of JPH01163337U publication Critical patent/JPH01163337U/ja
Pending legal-status Critical Current

Links

JP6049388U 1988-05-07 1988-05-07 Pending JPH01163337U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6049388U JPH01163337U (en]) 1988-05-07 1988-05-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6049388U JPH01163337U (en]) 1988-05-07 1988-05-07

Publications (1)

Publication Number Publication Date
JPH01163337U true JPH01163337U (en]) 1989-11-14

Family

ID=31286202

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6049388U Pending JPH01163337U (en]) 1988-05-07 1988-05-07

Country Status (1)

Country Link
JP (1) JPH01163337U (en])

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