JPH01163337U - - Google Patents
Info
- Publication number
- JPH01163337U JPH01163337U JP6049388U JP6049388U JPH01163337U JP H01163337 U JPH01163337 U JP H01163337U JP 6049388 U JP6049388 U JP 6049388U JP 6049388 U JP6049388 U JP 6049388U JP H01163337 U JPH01163337 U JP H01163337U
- Authority
- JP
- Japan
- Prior art keywords
- arm
- transport mechanism
- vertical movement
- support pedestal
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007723 transport mechanism Effects 0.000 claims description 5
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims 2
- 229910001285 shape-memory alloy Inorganic materials 0.000 claims 1
- 230000005611 electricity Effects 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6049388U JPH01163337U (en]) | 1988-05-07 | 1988-05-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6049388U JPH01163337U (en]) | 1988-05-07 | 1988-05-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01163337U true JPH01163337U (en]) | 1989-11-14 |
Family
ID=31286202
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6049388U Pending JPH01163337U (en]) | 1988-05-07 | 1988-05-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01163337U (en]) |
-
1988
- 1988-05-07 JP JP6049388U patent/JPH01163337U/ja active Pending
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